White Paper: Design of Miniature Piezo Motors
NEW PI Products
PInano™ particle Tracking Microscope Stages are the fastest multi-axis piezo stages for high resolution microscopy. Available in XY and XYZ.
The M-811 Miniature Hexapod 6-axis positioner combines high precision, high force, and very compact dimesions, ideal for use in small vacuum chambers.
PILine® M-663 piezo motor stages are the smallest piezo-motor-driven translation stages with linear encoders.
M-663 stages are based on patented, ultrasonic P-661 piezo motor drive developed by PI; the miniature drive can provide accelerations of up to 10 g and velocities to 400 mm/s. Self-locking at rest for high positional stability
PIHera® Low-Cost, Ultra-Long-Travel PZT Piezo Stage:
Longest Travel Piezo flexure stage with capacitive feedback for higher linearity & stabiity.
Now Available in X, XY, Z, XYZ
- Travel to 1800 µm
- Compact Design
- Resolution <1 nm
- Up to 0.02% Position Accuracy
- Vacuum-Compatible Versions
PICMA® High-Performance Monolithic Multilayer Piezo Actuators (LVPZT):
Work up to 150 deg C. Ceramic insulation (a worldwide first).
Ideal for extreme conditions (high temperature, high humidity, vacuum, etc.) Zero outgassing (no polymer insulation).
- Award-Winning Multilayer Piezo Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nanometer Resolution
S-334 Ultra-Long-Range 2-Axis Piezoelectric PZT Fast Steering Mirror:
- Optical Deflection to 100 mrad (~6°)
- 1.0 kHz Resonant Frequency with Mirror
- Closed-Loop for Higher Linearity
- 2 Fixed Orthogonal Axes with a Common Pivot Point
- Excellent Temperature Stability
- Precision Flexure Guides
PicoCube SPM & AFM Piezo Stage / Scanner:
P-363 is the smallest, highest precision closed-loop XYZ piezo scanner for AFM, SPM,
nanotechnology, nanomanipulation.
- Resonant Frequency 9.8 kHz
- Ultra-High-Precision Capacitive Feedback
- Parallel-Motion Metrology for Highest Linearity and Stability
- 50 Picometers Resolution
- 5 x 5 x 5 µm Travel Range
- Piezo Scanner for AFM Catalog
Products for Optics Algnment and Optical Telecommunications
PI offers a great selection of automated
optical alignment systemsand beam steering platforms for freespace optical telecommunication. Our positioning systems and components have helped many customers to improve performance and manufacturing throughput of various optical components.
Technotes on Automated Optical Alignment, Photonics Packaging and Imaging
Space Technology for NanoTech: Eliminate Settling Delays
Developed for the space station, Input Shaping® technology is now available for the NanoWorld:
The exclusive Mach™ Throughput Processor™ eliminates resonant ringing in high-speed Nanopositioning
systems, allowing rapid motion without a settling phase. This technique also eliminates resonances
excited in neighboring components, outside the nanopositioning system's servo loop. The result is
significantly increased throughput.
